@misc{indiciaea0a36991bb72,
  title = {Study of synchronous RF pulsing in dual frequency capacitively coupled plasma},
  author = {Verma, Abhishek Kumar and Rauf, Shahid and Bera, Kallol and Sydorenko, D. and Khrabrov, A. and Kaganovich, Igor},
  year = {2024},
  doi = {10.1088/1361-6595/ad29be},
  url = {https://www.osti.gov/biblio/2437697},
  note = {Source identifier: 2437697}
}