TY  - RPRT
TI  - Study of synchronous RF pulsing in dual frequency capacitively coupled plasma
AU  - Verma, Abhishek Kumar
AU  - Rauf, Shahid
AU  - Bera, Kallol
AU  - Sydorenko, D.
AU  - Khrabrov, A.
AU  - Kaganovich, Igor
PY  - 2024
DO  - 10.1088/1361-6595/ad29be
UR  - https://www.osti.gov/biblio/2437697
ID  - 2437697
ER  -