@misc{indiciae88057d24e5b7, title = {Precision Defect Engineering in 2D Materials via Automated STEM Atomic Fabrication}, author = {Boebinger, Matthew and Roccapriore, Kevin and Ghosh, Ayana and Xiao, Kai and Lupini, Andrew and Ziatdinov, Maxim and Kalinin, Sergei V. and Unocic, Raymond}, year = {2024}, doi = {10.1093/mam/ozae044.163}, url = {https://www.osti.gov/biblio/2438922}, note = {Source identifier: 2438922} }