TY  - RPRT
TI  - Precision Defect Engineering in 2D Materials via Automated STEM Atomic Fabrication
AU  - Boebinger, Matthew
AU  - Roccapriore, Kevin
AU  - Ghosh, Ayana
AU  - Xiao, Kai
AU  - Lupini, Andrew
AU  - Ziatdinov, Maxim
AU  - Kalinin, Sergei V.
AU  - Unocic, Raymond
PY  - 2024
DO  - 10.1093/mam/ozae044.163
UR  - https://www.osti.gov/biblio/2438922
ID  - 2438922
ER  -