@misc{indiciae2c8edaf2ebcc,
  title = {Ultra-thin on-chip ALD LiPON capacitors for high frequency application},
  author = {Ahuja, Kunal and Sallaz, Valentin and Nuwayhid, Ramsay Blake and Voiron, Frederic and McCluskey, Patrick and Rubloff, Gary W. and Gregorczyk, Keith E.},
  year = {2023},
  doi = {10.1016/j.jpowsour.2023.233056},
  url = {https://www.osti.gov/biblio/2447377},
  note = {Source identifier: 2447377}
}