@misc{indiciaecc13ad36a408, title = {Towards Deterministic Defect Center Fabrication Using Sandia’s Focused Ion Implantation Capabilities}, author = {Bielejec, Edward Salvatore}, year = {2023}, doi = {10.2172/2463062}, url = {https://www.osti.gov/biblio/2463062}, note = {Source identifier: 2463062} }