@misc{indiciaed3bdd0be60b0,
  title = {Improving Ion Control for Semiconductor Processing with Repetitive Pulsed Power - Phase II Final Technical Report},
  author = {Prager, James and Perry, Josh and Bowman, Chris},
  year = {2024},
  url = {https://www.osti.gov/biblio/2467550},
  note = {Source identifier: 2467550}
}