@misc{indiciae47ff4c13e4c1,
  title = {Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer},
  author = {Nakamura, Nathan and Szypryt, Paul and Dagel, Amber L. and Alpert, Bradley K. and Bennett, Douglas A. and Doriese, William Bertrand and Durkin, Malcolm and Fowler, Joseph W. and Fox, Dylan T. and Gard, Johnathon D. and Goodner, Ryan N. and Harris, James Zachariah and Hilton, Gene C. and Jimenez, Edward S. and Kernen, Burke L. and Larson, Kurt W. and Levine, Zachary H. and McArthur, Daniel and Morgan, Kelsey M. and O’Neil, Galen C. and Ortiz, Nathan J. and Pappas, Christine G. and Reintsema, Carl D. and Schmidt, Daniel R. and Schultz, Peter A. and Thompson, Kyle R. and Ullom, Joel N. and Vale, Leila and Vaughan, Courtenay T. and Walker, Christopher and Weber, Joel C. and Wheeler, Jason W. and Swetz, Daniel S.},
  year = {2024},
  doi = {10.3390/s24092890},
  url = {https://www.osti.gov/biblio/2469889},
  note = {Source identifier: 2469889}
}