@misc{indiciae67576c64cde8,
  title = {Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications},
  author = {Gikunda, Millicent N. and Harerimana, Ferdinand and Mangum, James M. and Rahman, Sumaya and Thompson, Joshua P. and Harris, Charles Thomas and Churchill, Hugh O. H. and Thibado, Paul M.},
  year = {2022},
  doi = {10.3390/membranes12050533},
  url = {https://www.osti.gov/biblio/2469900},
  note = {Source identifier: 2469900}
}