TY  - RPRT
TI  - Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications
AU  - Gikunda, Millicent N.
AU  - Harerimana, Ferdinand
AU  - Mangum, James M.
AU  - Rahman, Sumaya
AU  - Thompson, Joshua P.
AU  - Harris, Charles Thomas
AU  - Churchill, Hugh O. H.
AU  - Thibado, Paul M.
PY  - 2022
DO  - 10.3390/membranes12050533
UR  - https://www.osti.gov/biblio/2469900
ID  - 2469900
ER  -