@misc{indiciaeca394ec1c68b,
  title = {Vertical Etching of Scandium Aluminum Nitride Thin Films Using TMAH Solution},
  author = {Shifat, A. Zadid and Stricklin, Isaac and Chityala, Ravi Kiran and Aryal, Arjun and Esteves, Giovanni and Siddiqui, Aleem and Busani, Tito},
  year = {2023},
  doi = {10.3390/nano13020274},
  url = {https://www.osti.gov/biblio/2469901},
  note = {Source identifier: 2469901}
}