TY  - RPRT
TI  - Vertical Etching of Scandium Aluminum Nitride Thin Films Using TMAH Solution
AU  - Shifat, A. Zadid
AU  - Stricklin, Isaac
AU  - Chityala, Ravi Kiran
AU  - Aryal, Arjun
AU  - Esteves, Giovanni
AU  - Siddiqui, Aleem
AU  - Busani, Tito
PY  - 2023
DO  - 10.3390/nano13020274
UR  - https://www.osti.gov/biblio/2469901
ID  - 2469901
ER  -