@misc{indiciaef2c0399b8bb0,
  title = {Modeling and Design Parameter Optimization to Improve the Sensitivity of a Bimorph Polysilicon-Based MEMS Sensor for Helium Detection},
  author = {Mohaidat, Sulaiman and Alsaleem, Fadi},
  year = {2024},
  doi = {10.3390/s24113626},
  url = {https://www.osti.gov/biblio/2471814},
  note = {Source identifier: 2471814}
}