TY  - RPRT
TI  - Modeling and Design Parameter Optimization to Improve the Sensitivity of a Bimorph Polysilicon-Based MEMS Sensor for Helium Detection
AU  - Mohaidat, Sulaiman
AU  - Alsaleem, Fadi
PY  - 2024
DO  - 10.3390/s24113626
UR  - https://www.osti.gov/biblio/2471814
ID  - 2471814
ER  -