@misc{indiciaeaebee4262b1d,
  title = {Industrial data-driven machine learning soft sensing for optimal operation of etching tools},
  author = {Ou, Feiyang and Wang, Henrik (ORCID:0000000158631209) and Zhang, Chao and Tom, Matthew (ORCID:0000000278927418) and Bom, Sthitie and Davis, James F. and Christofides, Panagiotis D.},
  year = {2024},
  doi = {10.1016/j.dche.2024.100195},
  url = {https://www.osti.gov/biblio/2473338},
  note = {Source identifier: 2473338}
}