TY  - RPRT
TI  - Industrial data-driven machine learning soft sensing for optimal operation of etching tools
AU  - Ou, Feiyang
AU  - Wang, Henrik (ORCID:0000000158631209)
AU  - Zhang, Chao
AU  - Tom, Matthew (ORCID:0000000278927418)
AU  - Bom, Sthitie
AU  - Davis, James F.
AU  - Christofides, Panagiotis D.
PY  - 2024
DO  - 10.1016/j.dche.2024.100195
UR  - https://www.osti.gov/biblio/2473338
ID  - 2473338
ER  -