@misc{indiciaefd51aa339717,
  title = {Microscopic and elemental analysis of temperature-induced changes in sulfur/silicon nitride stack-passivated Si surface},
  author = {Mouri, Tasnim Kamal and Upadhyaya, Ajay and Rohatgi, Ajeet and Woo OK, Young and Shafarman, William N. and Das, Ujjwal K.},
  year = {2025},
  doi = {10.1016/j.apsusc.2024.161557},
  url = {https://www.osti.gov/biblio/2475534},
  note = {Source identifier: 2475534}
}