TY  - RPRT
TI  - Microscopic and elemental analysis of temperature-induced changes in sulfur/silicon nitride stack-passivated Si surface
AU  - Mouri, Tasnim Kamal
AU  - Upadhyaya, Ajay
AU  - Rohatgi, Ajeet
AU  - Woo OK, Young
AU  - Shafarman, William N.
AU  - Das, Ujjwal K.
PY  - 2025
DO  - 10.1016/j.apsusc.2024.161557
UR  - https://www.osti.gov/biblio/2475534
ID  - 2475534
ER  -