TY  - RPRT
TI  - FPAA-based control of a high-speed flexure-guided AFM nanopositioner
AU  - Khodabakhshi, Erfan (ORCID:0000000150457592)
AU  - Moheimani, S. O. Reza (ORCID:0000000212254126)
PY  - 2024
DO  - 10.1016/j.mechatronics.2024.103268
UR  - https://www.osti.gov/biblio/2478037
ID  - 2478037
ER  -