@misc{indiciae8a69d49268e6,
  title = {An automatic multi-precursor flow-type atomic layer deposition system},
  author = {Rodriguez, Daniel Jorge and Her, Mai Ar and Usov, Igor Olegovich and Safarik, Douglas Joseph and Jones, Rommel and Heidlage, Michael Gregory and Gorey, Timothy John},
  year = {2024},
  doi = {10.1063/5.0222271},
  url = {https://www.osti.gov/biblio/2478638},
  note = {Source identifier: 2478638}
}