@misc{indiciaea8212259bf74,
  title = {Comparative S/TEM study of superconducting Ta quantum resonators by wet and dry etching types},
  author = {Mun, Junsik and Zhou, Chenyu and Kisslinger, Kim and Liu, Mingzhao and Zhu, Yimei},
  year = {2024},
  doi = {10.1063/5.0233167},
  url = {https://www.osti.gov/biblio/2478779},
  note = {Source identifier: 2478779}
}