TY  - RPRT
TI  - Comparative S/TEM study of superconducting Ta quantum resonators by wet and dry etching types
AU  - Mun, Junsik
AU  - Zhou, Chenyu
AU  - Kisslinger, Kim
AU  - Liu, Mingzhao
AU  - Zhu, Yimei
PY  - 2024
DO  - 10.1063/5.0233167
UR  - https://www.osti.gov/biblio/2478779
ID  - 2478779
ER  -