@misc{indiciaef93ee4aab32f,
  title = {A Scalable \& Non-Destructive Characterization Strategy to Study Semiconductor/Dielectric Interfaces and Predict Wafer-Level Device Performance},
  author = {Rummel, Brian Douglas and Meyerson, Melissa Lynn and Glaser, Caleb E. and Klesko, Joseph Peter},
  year = {2024},
  doi = {10.2172/2480157},
  url = {https://www.osti.gov/biblio/2480157},
  note = {Source identifier: 2480157}
}