TY  - RPRT
TI  - A Scalable & Non-Destructive Characterization Strategy to Study Semiconductor/Dielectric Interfaces and Predict Wafer-Level Device Performance
AU  - Rummel, Brian Douglas
AU  - Meyerson, Melissa Lynn
AU  - Glaser, Caleb E.
AU  - Klesko, Joseph Peter
PY  - 2024
DO  - 10.2172/2480157
UR  - https://www.osti.gov/biblio/2480157
ID  - 2480157
ER  -