@misc{indiciae41e05df7029a,
  title = {Correlating aluminum layer deposition rates, Josephson junction microstructure, and superconducting qubits’ performance},
  author = {Oh, Jin-Su [Ames Laboratory (AMES), Ames, IA (United States)] (ORCID:0000000274623142) and Kopas, Cameron J. [Rigetti Computing, Berkeley, CA (United States)] (ORCID:0000000261842987) and Cansizoglu, Hilal [Rigetti Computing, Berkeley, CA (United States)] and Mutus, Joshua Y. [Rigetti Computing, Berkeley, CA (United States)] and Yadavalli, Kameshwar [Rigetti Computing, Berkeley, CA (United States)] (ORCID:0000000192490382) and Kim, Tae-Hoon [Ames Laboratory (AMES), Ames, IA (United States)] and Kramer, Matt [Ames Laboratory (AMES), Ames, IA (United States)] (ORCID:0000000290976730) and King, Alexander H. [Iowa State University, Ames, IA (United States)] (ORCID:0000000171016585) and Zhou, Lin [Ames Laboratory (AMES), Ames, IA (United States); Iowa State University, Ames, IA (United States)] (ORCID:0000000322866510)},
  year = {2024},
  doi = {10.1016/j.actamat.2024.120631},
  url = {https://www.osti.gov/biblio/2481277},
  note = {Source identifier: 2481277}
}