TY  - RPRT
TI  - Correlating aluminum layer deposition rates, Josephson junction microstructure, and superconducting qubits’ performance
AU  - Oh, Jin-Su [Ames Laboratory (AMES), Ames, IA (United States)] (ORCID:0000000274623142)
AU  - Kopas, Cameron J. [Rigetti Computing, Berkeley, CA (United States)] (ORCID:0000000261842987)
AU  - Cansizoglu, Hilal [Rigetti Computing, Berkeley, CA (United States)]
AU  - Mutus, Joshua Y. [Rigetti Computing, Berkeley, CA (United States)]
AU  - Yadavalli, Kameshwar [Rigetti Computing, Berkeley, CA (United States)] (ORCID:0000000192490382)
AU  - Kim, Tae-Hoon [Ames Laboratory (AMES), Ames, IA (United States)]
AU  - Kramer, Matt [Ames Laboratory (AMES), Ames, IA (United States)] (ORCID:0000000290976730)
AU  - King, Alexander H. [Iowa State University, Ames, IA (United States)] (ORCID:0000000171016585)
AU  - Zhou, Lin [Ames Laboratory (AMES), Ames, IA (United States); Iowa State University, Ames, IA (United States)] (ORCID:0000000322866510)
PY  - 2024
DO  - 10.1016/j.actamat.2024.120631
UR  - https://www.osti.gov/biblio/2481277
ID  - 2481277
ER  -