@misc{indiciaec2160d3f9165,
  title = {Report on laser-induced fluorescence transitions relevant for the microelectronics industry and sustainability applications},
  author = {Kondeti, V. S. Santosh K. and Yatom, Shurik and Romadanov, Ivan and Raitses, Yevgeny and Dorf, Leonid and Khomenko, Andrei},
  year = {2024},
  doi = {10.1116/6.0004070},
  url = {https://www.osti.gov/biblio/2482503},
  note = {Source identifier: 2482503}
}