@misc{indiciae94702c47eed5, title = {A sensing material-free and simple readout MEMS sensor for detecting Helium}, author = {Mohaidat, Sulaiman and Okour, Mohammad (ORCID:0009000451725578) and Alsaleem, Fadi (ORCID:0000000181344080)}, year = {2025}, doi = {10.1088/1361-6439/adaf2e}, url = {https://www.osti.gov/biblio/2507254}, note = {Source identifier: 2507254} }