TY  - RPRT
TI  - A sensing material-free and simple readout MEMS sensor for detecting Helium
AU  - Mohaidat, Sulaiman
AU  - Okour, Mohammad (ORCID:0009000451725578)
AU  - Alsaleem, Fadi (ORCID:0000000181344080)
PY  - 2025
DO  - 10.1088/1361-6439/adaf2e
UR  - https://www.osti.gov/biblio/2507254
ID  - 2507254
ER  -