@misc{indiciaea61ad6f3a0e7,
  title = {Dopant Sensitive Electrolytic Etching of Germanium with High Selectivity},
  author = {Wood, Joseph G. and Carpenter, Arthur C. and Hunt, Charles E. and van Benthem, Klaus (ORCID:000000018865046X)},
  year = {2025},
  doi = {10.1149/1945-7111/adb21a},
  url = {https://www.osti.gov/biblio/2511191},
  note = {Source identifier: 2511191}
}