@misc{indiciaeea49b0a2f8f2,
  title = {Machine Learning of Plasma Science for Next Generation Microelectronics (Project Final Report)},
  author = {Bentz, Brian Zahler and Hardin, Thomas James and Fierro, Andrew S. and Youngman, Kevin and Barberena Valencia, Juan Pablo and Hopkins, Matthew M. and Gorman, Grant Michael and Belianinov, Alex Andrei},
  year = {2024},
  doi = {10.2172/2516889},
  url = {https://www.osti.gov/biblio/2516889},
  note = {Source identifier: 2516889}
}