@misc{indiciae3584f78ed237,
  title = {Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography},
  author = {Khanal, Bishnu Prasad [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000187100095) and Dugger, Marlene [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)]},
  year = {2025},
  doi = {10.1016/j.mee.2025.112330},
  url = {https://www.osti.gov/biblio/2530813},
  note = {Source identifier: 2530813}
}