TY  - RPRT
TI  - Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography
AU  - Khanal, Bishnu Prasad [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000187100095)
AU  - Dugger, Marlene [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)]
PY  - 2025
DO  - 10.1016/j.mee.2025.112330
UR  - https://www.osti.gov/biblio/2530813
ID  - 2530813
ER  -