TY  - RPRT
TI  - Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy
AU  - Kaspar, Tiffany C. (ORCID:0000000328167569)
AU  - Akers, Sarah (ORCID:0000000337275801)
AU  - Sprueill, Henry W. (ORCID:0000000279814175)
AU  - Ter-Petrosyan, Arman H. (ORCID:0000000309238253)
AU  - Bilbrey, Jenna A. (ORCID:0000000241997244)
AU  - Hopkins, Derek
AU  - Harilal, Ajay
AU  - Christudasjustus, Jijo (ORCID:0000000260244467)
AU  - Gemperline, Patrick (ORCID:0000000153019133)
AU  - Comes, Ryan B. (ORCID:0000000253046921)
PY  - 2025
DO  - 10.1116/6.0004493
UR  - https://www.osti.gov/biblio/2540152
ID  - 2540152
ER  -