@misc{indiciaee783b970e492,
  title = {Integration of semiconductor membranes with piezoelectric substrates},
  author = {Lagally, Max G. and Bhat, Abhishek and Flack, Frank Steele and Scott, Shelley Ann and Blick, Robert H.},
  year = {2024},
  url = {https://www.osti.gov/biblio/2541646},
  note = {Source identifier: 2541646}
}