TY  - RPRT
TI  - Integration of semiconductor membranes with piezoelectric substrates
AU  - Lagally, Max G.
AU  - Bhat, Abhishek
AU  - Flack, Frank Steele
AU  - Scott, Shelley Ann
AU  - Blick, Robert H.
PY  - 2024
UR  - https://www.osti.gov/biblio/2541646
ID  - 2541646
ER  -