@misc{indiciaeca496371f0af,
  title = {Photolithography system including selective light array},
  author = {Young, Barbara Diane and Sedlock, Steven James and Lane, Jr., Gregory Layton and Ledden, Kevin Christopher},
  year = {2024},
  url = {https://www.osti.gov/biblio/2541712},
  note = {Source identifier: 2541712}
}