@misc{indiciae582d218a37df,
  title = {Acoustics-based noninvasive wafer defect detection},
  author = {Pantea, Cristian and Greenhall, John James and Graham, Alan Lyman and Sinha, Dipen N.},
  year = {2024},
  url = {https://www.osti.gov/biblio/2541722},
  note = {Source identifier: 2541722}
}