@misc{indiciaeac2c37fb2d0c,
  title = {Three dimensional vertically structured electronic devices},
  author = {Conway, Adam and Harrison, Sara Elizabeth and Nikolic, Rebecca and Shao, Qinghui and Voss, Lars},
  year = {2024},
  url = {https://www.osti.gov/biblio/2542925},
  note = {Source identifier: 2542925}
}