@misc{indiciae74282c5bb591, title = {Controlled Growth of Ta Oxide With Reactive Sputtering for Overlap Josephson Junction Application}, author = {Panthee, Jasmine [Fermilab] and Bal, Mustafa [Fermilab] and Garattoni, Sabrina [Fermilab] and Crisa, Francesco [Fermilab] and Lee, Jae Yel [Fermilab] and Clairmont, Adam [Fermilab] and Murthy, Akshay [Fermilab] and Grassellino, Anna [Fermilab] and Chandrasekhar, Venkat [Fermilab]}, year = {2025}, doi = {10.2172/2549323}, url = {https://www.osti.gov/biblio/2549323}, note = {Source identifier: 2549323} }