TY - RPRT TI - Controlled Growth of Ta Oxide With Reactive Sputtering for Overlap Josephson Junction Application AU - Panthee, Jasmine [Fermilab] AU - Bal, Mustafa [Fermilab] AU - Garattoni, Sabrina [Fermilab] AU - Crisa, Francesco [Fermilab] AU - Lee, Jae Yel [Fermilab] AU - Clairmont, Adam [Fermilab] AU - Murthy, Akshay [Fermilab] AU - Grassellino, Anna [Fermilab] AU - Chandrasekhar, Venkat [Fermilab] PY - 2025 DO - 10.2172/2549323 UR - https://www.osti.gov/biblio/2549323 ID - 2549323 ER -