TY - RPRT TI - Machine learning-assisted laser-induced breakdown spectroscopy for estimating substrate surface temperatures AU - Dong, Haoyu [Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA] AU - Huang, Xi [Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA] (ORCID:0000000244773748) AU - Wadle, Luke [Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA] AU - Trinh, Lanh [Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA] (ORCID:000000017066867X) AU - Li, Peizi [Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA] AU - Silvain, Jean-Francois [CNRS, University of Bordeaux, Bordeaux I.N.P., ICMCB, UMR 5026, F-33608 Pessac, France] AU - Cui, Bai [Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA] AU - Lu, Yongfeng [Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA] (ORCID:0000000259421999) PY - 2025 DO - 10.1039/d4ja00437j UR - https://www.osti.gov/biblio/2549457 ID - 2549457 ER -