@misc{indiciae8db03ecf4a27,
  title = {Ta Based Damascene Resonators},
  author = {Liu, Mingzhao (ORCID:0000000209995214) and Rebar, Drew J. and Liu, Mingzhao and Nanayakkara, Tharanga and Zhou, Chenyu and Macy, Juan and VanDevender, Brent A. and Warner, Marvin and Bhatia, Ekta and Rao, Satyavolu P.},
  year = {2024},
  doi = {10.1109/qce60285.2024.10391},
  url = {https://www.osti.gov/biblio/2560708},
  note = {Source identifier: 2560708}
}