TY  - RPRT
TI  - Ta Based Damascene Resonators
AU  - Liu, Mingzhao (ORCID:0000000209995214)
AU  - Rebar, Drew J.
AU  - Liu, Mingzhao
AU  - Nanayakkara, Tharanga
AU  - Zhou, Chenyu
AU  - Macy, Juan
AU  - VanDevender, Brent A.
AU  - Warner, Marvin
AU  - Bhatia, Ekta
AU  - Rao, Satyavolu P.
PY  - 2024
DO  - 10.1109/qce60285.2024.10391
UR  - https://www.osti.gov/biblio/2560708
ID  - 2560708
ER  -