@misc{indiciae359c808bec66,
  title = {Consistency and reproducibility in atomic layer deposition},
  author = {Sønsteby, Henrik H. (ORCID:0000000255971125) and Yanguas-Gil, Angel (ORCID:0000000182073825) and Elam, Jeffrey W. (ORCID:0000000258612996)},
  year = {2020},
  doi = {10.1116/1.5140603},
  url = {https://www.osti.gov/biblio/2561486},
  note = {Source identifier: 2561486}
}