TY  - RPRT
TI  - Consistency and reproducibility in atomic layer deposition
AU  - Sønsteby, Henrik H. (ORCID:0000000255971125)
AU  - Yanguas-Gil, Angel (ORCID:0000000182073825)
AU  - Elam, Jeffrey W. (ORCID:0000000258612996)
PY  - 2020
DO  - 10.1116/1.5140603
UR  - https://www.osti.gov/biblio/2561486
ID  - 2561486
ER  -