@misc{indiciaeb72d06824388,
  title = {Binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with significantly curved x-ray optics},
  author = {Munechika, Keiko and Yamada, Kaito and Rochester, Simon and Barnard, Harold and Chao, Weilun and Lacey, Ian and Pina-Hernandez, Carlos A. and Takacs, Peter Z. and Yashchuk, Valeriy V.},
  year = {2024},
  doi = {10.1117/12.3028493},
  url = {https://www.osti.gov/biblio/2564197},
  note = {Source identifier: 2564197}
}