TY  - RPRT
TI  - Binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with significantly curved x-ray optics
AU  - Munechika, Keiko
AU  - Yamada, Kaito
AU  - Rochester, Simon
AU  - Barnard, Harold
AU  - Chao, Weilun
AU  - Lacey, Ian
AU  - Pina-Hernandez, Carlos A.
AU  - Takacs, Peter Z.
AU  - Yashchuk, Valeriy V.
PY  - 2024
DO  - 10.1117/12.3028493
UR  - https://www.osti.gov/biblio/2564197
ID  - 2564197
ER  -