@misc{indiciaec457a39a26d0, title = {Mechanistically Informed Strategies for Site-Selective Atomic Layer Deposition}, author = {Jones, Jessica C. and Kamphaus, Ethan P. and Cheng, Lei and Liu, Cong and Martinson, Alex B. F. and Hock, Adam S.}, year = {2024}, doi = {10.1021/acs.chemmater.4c01329}, url = {https://www.osti.gov/biblio/2567000}, note = {Source identifier: 2567000} }