TY  - RPRT
TI  - Mechanistically Informed Strategies for Site-Selective Atomic Layer Deposition
AU  - Jones, Jessica C.
AU  - Kamphaus, Ethan P.
AU  - Cheng, Lei
AU  - Liu, Cong
AU  - Martinson, Alex B. F.
AU  - Hock, Adam S.
PY  - 2024
DO  - 10.1021/acs.chemmater.4c01329
UR  - https://www.osti.gov/biblio/2567000
ID  - 2567000
ER  -